Kyma Announces Improved Molybdenum Disulfide (MoS2) Films & New Molybdenum Precursor

by Keith Evans

Kyma Technologies is pleased to announce the improvement of its crystalline 2D MoS2 materials product offering and the addition of a novel Mo precursor product for producing such films.

Kyma first entered into crystalline 2D materials technology in 2013 when it teamed with leading 2D materials expert Professor Josh Robinson of Penn State University (see announcement). Robinson was seeking to demonstrate the diameter scalability of his laboratory scale process for growing crystalline monolayer films of WS2 - a member of the transition metal dichalcogenide (TMDC) family of materials. The ensuing effort was successful: Kyma was able to create 2-inch and 4-inch diameter crystallineWS2 films by transitioning PSU's process to an existing 4-inch capable crystal growth tool which Kyma previously used for III-N materials. The Kyma-PSU team continued its 2D TMDC materials collaboration which led to two jointly funded projects focused on electronic grade MoS2 materials technology development. One of those projects was a multi-year R&D project to develop tools and processes for fabricating 4-inch diameter crystalline films of electronic grade MoS2. In that project Kyma examined the two most popular growth approaches in the literature - one being chemical vapor transport (CVT) which uses MoO3 powder as the Mo precursor, and the other being chemical vapor deposition (CVD) which uses gaseous Mo(CO)6 as the Mo precursor. Both of those approaches show good potential but the CVT approach suffers from issues of film purity and overall process controllability and uniformity, while the CVD approach suffers from the high cost and low thermal stability of the Mo precursor. The team was motivated to look beyond these approaches to find a lower cost and more controllable approach to growing these films and that is when they discovered KyMoly™ - a new Mo source material that supports controllable and uniform growth of high quality crystalline MoS2 films.

Today's announcement is the first public announcement of Kyma's new modified CVT MoS2 manufacturing process based on its novel Mo precursor which the company is calling KyMoly™. Like the conventional CVT approach, KyMoly™ is a powdered source material. However, while in the conventional CVT approach a gaseous MoOx species (x is currently unknown) is the actual species which is transported to the growth surface, KyMoly™ is designed to decompose in-situ to create a continuous in-situ source of MoCly (y is currently unknown). For film purity reasons, metal halide precursors are generally preferred over metal oxide precursors for non-metal oxide crystal growth. Kyma has verified that KyMoly™ is an effective precursor when used in conjunction with multiple S-precursor approaches, including both H2S and solid sulfur.

Kyma's PSU partners have characterized a number of properties of Kyma's MoS2 materials and have demonstrated its ability to support high performance RF device fabrication. As such, a new manuscript detailing KyMoly™-enabled MoS2-based RF devices as well as the associated materials properties is currently under preparation.

Like other TMDC materials, today's market crystalline MoS2 materials is not large and consists primarily of researchers seeking to better understand the materials and to create novel semiconductor devices from them. Kyma's decision to offer both MoS2 materials and the novel precursor for fabricating them is meant to attract the attention of groups that make their own materials as well as those research groups which rely on other sources.

Keith Evans, Kyma's president and CEO, commented, “KyMoly™ is an exciting new source material for the cost-effective manufacturing of high-quality MoS2 films. By serving as a reliable in-situ source of high-purity molybdenum chloride, KyMoly™ makes it possible to produce higher-quality, uniform, large-diameter films of crystalline MoS2 in a cost-effective manner. We are pleased to offer both the improved MoS2 films enabled by KyMoly™ to customers who prefer to outsource the growth of their MoS2 materials, and we are pleased to offer the KyMoly™ precursor to those customers who prefer to make their own MoS2."

For more information about Kyma's MoS2 materials products and its new KyMoly™ precursor, see the associated Crystalline MoS2 Materials product page.

About Kyma Technologies, Inc.

Kyma’s mission is to provide advanced materials solutions that promote energy efficiency. Kyma’s products include a diverse portfolio of advanced crystalline materials (including GaN, AlN, AlGaN, Ga2O3, and MoS2), crystal growth tools for fabricating such materials, and GaN-based photoconductive semiconductor switch (PCSS) devices.

For more information about Kyma, visit www.kymatech.com, send an email to info@kymatech.com, or call the company directly at 919.789.8880.

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