UV Grade AlN on Sapphire Templates

Kyma’s UV Grade AlN on Sapphire Templates, available in diameters from 2" to 6", consist of a thin layer of high purity crystalline AlN which is designed to meet the demanding requirements of UVC LED applications.

Kyma uses a cost-effective, patented, and proprietary process to manufacture these new templates which are available in 2-inch, 4-inch, and 6-inch diameters. They exhibit (002) and (102) XRD full-width at half maximum (FWHM) linewidths as low as 50 arcsec and 260 arcsec, respectively. Atomic force microscopy (AFM) measurements show a root mean square (RMS) roughness value <2 nm with most wafers supplied so far being ~1 nm. 

Additionally, high substrate transparency is critical for obtaining high light extraction efficiency, which has been a significant problem for sublimation or physical vapor transport (PVT) grown bulk AlN substrates for UV-C applications. Kyma’s UV AlN Templates show an extremely clean bandgap all the way to the band edge.

Additional information about their physical properties are found in the specification sheet which can be accessed below.