External Metal-Halide Sources

Kyma's external metal-halide (EMH) sources enable a robust, cost-effective extension of existing crystal growth capabilities to enable new materials compositions. 

Kyma has over a decade of experience using metal halide source technology to transport Ga, Al, Fe, Mn, Mg, and Cr. 

Applications of Kyma's EMH Source include the addition of various metal dopants to existing growth tools, the conversion of a GaN growth tool to one that can grow binaries and alloys of (Al,Ga)N, and the conversion of a Ga2O3 growth tool to one that can grow binaries and alloys of (Al,Ga)2O3

Additionally, we expect the EMH Source to work with indium (In) which Kyma plans to implement in its own growth efforts in the near future.

Key features of Kyma's EMH Source include:

  • External delivery of solid precursor
  • Easy temperature control
  • Customization available