K200™ HVPE Growth Tool

Kyma's K200™ HVPE Growth Tool is the industry's first fully automated large diameter HVPE production tool and is designed for rapid production of uniform films of high quality GaN on a number of different substrates.

The design of Kyma's K200™ HVPE Growth Tool leverages over a decade of experience at Kyma in application of hydride vapor phase epitaxy (HVPE) to the growth of a number of wide bandgap semiconductor materials including GaN, AlN, AlGaN, and Ga2O3. The K200™ HVPE Growth Tool has the following features, capabilities, and configuration options.

Key Features & Capabilities

  • Fully Automated 25x200mm Wafer Carousel Loadlock & Transfer System
  • Designed by Kyma and Brought to Market by a World Class III-N OEM
  • System Leverages Over a Decade of Kyma Process Experience
  • High Uniformity 1x200-mm Diameter Wafer Growth
  • Long Uptime & Fast Maintenance Cycles
  • Growth Rate of 10 – 200μm/hr
  • Standard Design is for GaN Growth

Available Options

  • AlN, AlGaN, Ga2O3 Growth
  • Si, Fe, Mg, and Other Dopants