Aluminum Nitride (AlN) Templates

Kyma’s AlN templates, available in diameters up to 12", consist of a thin layer of crystalline AlN grown epitaxially by PVDNC™ on a sapphire or silicon substrate. Customers use our AlN templates as a low cost alternative to 2-step nitride nucleation processes.

Kyma uses these templates for all of our GaN epitaxy, on all substrate types. PVDNC™ has excellent scalability which results in lower cost of ownership when ramping production. LED customers report:

  • Better wavelength uniformity
  • Higher LED brightness
  • Better nucleation repeatability than low temperature MOCVD nucleation


Conduction Type Undoped
Resistivity >106 Ohm-cm
Front Surface Finish Epi-ready, <0.5nm (for 25nm)
Available Sizes 2-12"
Available Substrates Sapphire, Silicon
Available Thicknesses 10nm up to 5000nm