K200™ HVPE Growth Tools

Kyma's K200™ HVPE Growth Tool is the industry's first fully automated large diameter hydride vapor phase epitaxy (HVPE) growth tool.

The K200™ HVPE Growth Tool design benefits from hundreds of engineering advances achieved over 15 years of experience at Kyma in the application of HVPE to the growth of GaN, AlN, AlGaN and Ga2O3. These engineering advances include detailed hardware and gas flow designs which together serve to increased tool uptime between maintenance events and to minimize the cost of replacement parts associated with each maintenance event. All routine replacement parts are kept in inventory at Kyma and are available on short notice to Kyma's customers.

Key Features & Capabilities
Fully Automated 25x200mm Wafer Carousel Loadlock & Transfer System
Designed by Kyma and Manufactured by a World Class OEM
System Leverages >15 Years of Kyma Process Experience
Standard Design is for GaN Growth and uses an Internal Ga Source
High Uniformity 1x200mm Diameter Wafer Growth
High Uptime & Long Growth Campaigns Supporting >1 mm GaN Growth per Campaign
Fast & Inexpensive Maintenance Cycles
Available Options
AlN, AlGaN, Ga2O3, & (Al,Ga)2O3 Growth
Si, Fe, Mg and Other Dopants
External Metal Sources
1x150mm Wafer Configuration