Kyma's K200™ HVPE Growth Tool is the industry's first fully automated large diameter hydride vapor phase epitaxy (HVPE) growth tool.

The K200™ HVPE Growth Tool design benefits from hundreds of engineering advances achieved over 15 years of experience at Kyma in the application of HVPE to the growth of GaN, AlN, AlGaN and Ga₂O₃. These engineering advances include detailed hardware and gas flow designs which together serve to increased tool uptime between maintenance events and to minimize the cost of replacement parts associated with each maintenance event. All routine replacement parts are kept in inventory at Kyma and are available on short notice to Kyma's customers.

Key Features & Capabilities

Fully Automated 25x200mm Wafer Carousel Loadlock & Transfer System

Designed by Kyma and Manufactured by a World Class OEM

System Leverages >15 Years of Kyma Process Experience

Standard Design is for GaN Growth and uses an Internal Ga Source

High Uniformity 1x200mm Diameter Wafer Growth

High Uptime & Long Growth Campaigns Supporting >1 mm GaN Growth per Campaign

Fast & Inexpensive Maintenance Cycles

Available Options

AlN, AlGaN, Ga2O3, & (Al,Ga)2O3 Growth

Si, Fe, Mg and Other Dopants

External Metal Sources

1x150mm Wafer Configuration

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